The evaporation stack holds the OFET source-drain shadow masks and substrates in close contact for thermal evaporation. This is crucial for effective device fabrication as the source-drain channel is usually the most critical feature on an OFET. For use with the Ossila low density OFET source-drain evaporation masks (sold separately).
The diagram below shows an exploded view of how the evaporation stack fits together. At the base of the system is the lower support which prevents the thin and flexible shadow masks from warping. The shadow masks are then placed on top of the lower support. Above this, the substrate support holds the substrates in alignment with the mask before a low strength magnetic sheet is placed on to pull the shadow mask in close contact with the substrates. Finally the lid is used to bolt everything together into a mechanically stable system that can be mounted in a deposition system at any orientation.
Holds the substrates and magnetic sheet in position.
Makes sure that the shadow mask adheres to the substrate.
Up to twelve substrates per mask (sold separately).
Holds and aligns the substrates in position above the shadow mask.
Interchangeable shadow masks with varying designs. Five OFETs per substrate (sold separately).
Provides mechanical support to the thin and flexible shadow masks.
|Size||75 mm x 75 mm|
|Thickness||1 mm (exc. bolts)|
Demonstration video of the low density OFET evaporation stack
Please note that the shadow mask and the substrates featured in the video are used to demonstrate how the stack is used and are not included as part it.
To the best of our knowledge the technical information provided here is accurate. However, Ossila assume no liability for the accuracy of this information. The values provided here are typical at the time of manufacture and may vary over time and from batch to batch.