UV Ozone Cleaner

Order Code: L2002A2-UK
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Ossila's UV Ozone Cleaner is capable of removing contamination on the surface of samples, providing you with ultraclean surfaces within minutes. By using a high-power UV light source, ozone is generated - which then breaks down surface contaminants into volatile compounds. These volatile compounds evaporate from the surface leaving no trace. This method can produce near-atomically clean surfaces without causing damage to the sample. 

Our UV Ozone Cleaner houses a 100mm x 100mm tray for positioning samples under the UV light source. Simply place the samples onto the tray, close the door, set your time, and press go.

At £1950 Ossila's UV Ozone Cleaner will not be beaten on price. This product is covered by our FREE 2-year warranty.

What is UV Ozone Cleaning?

UV ozone cleaning is a photo-sensitised oxidation process in which short-wavelength UV radiation is absorbed by organic molecules in order to dissociate them from a surface (via chemical reactions with ozone molecules). It is an excellent technique for cleansing surfaces of photo-resists, resins, residues from cleaning solvents, flux, oils, and for surface sterilization all of which can influence the properties of the surface of your sample. Unlike other cleaning techniques (e.g. oxygen plasma treatment), UV ozone cleaning does not cause significant surface damage.

Figure 1. Video showing the process of ozone formation and photosensitized oxidation of organic contaminants.

The UV ozone system uses a high-intensity UV light source which illuminates the target surface with light of two wavelengths, 185nm and 254nm. Molecular oxygen (O2) present within the system is dissociated by UV radiation with a wavelength less than 200 nm, resulting in two free radicals of oxygen (O•). Each of these free radicals can subsequently react with further molecular oxygen to produce ozone (O3) molecules (Figure 1). UV radiation above 200nm that is not absorbed by residual oxygen is strongly absorbed by organic chemical bonds present on the surface of the substrate. Upon absorption this causes the creation of excited states or organic radicals. These reactive organic species, when in contact with the unstable ozone molecules result in the formation of volatile species such as CO2, H2O, N2 and short chain organic compounds. These volatile compounds can easily desorb from the surface leaving it clean.

UV Ozone Cleaner Applications

Examples of applications for UV Ozone Cleaners:

  • Surface cleaning
  • Preparation for thin film deposition
  • UV curing
  • Surface sterilization
  • Cleaning of AFM/STM probes
  • UV chemical reactions
  • Cleaning of optical components
  • Improving surface hydrophilicity
  • Removal of surface monolayers
  • Oxidation of surfaces
  • Micropatterning

Examples of materials that can be cleaned:

  • Quartz
  • Silicon
  • Silicon Oxide
  • Silicon Nitride
  • Gold
  • Nickel
  • Aluminium
  • Gallium Arsenide
  • Alumina
  • Glass
  • Stainless Steel

The images below shows the impact of UV ozone treatment on a substrate to improve surface hydrophilicity.

Low energy substrate surface before UV Ozone cleaning High energy substrate surface after UV Ozone cleaning
Water drop on OTS-treated silicon substrate (300 nm SiO2 on surface) before UV ozone cleaning (left) and after 10 minutes UV ozone cleaning (right).

UV Ozone Cleaner Features

Ossila's UV Ozone Cleaner has the following features:

  • Lowest-cost UV Ozone Cleaner
  • 100 mm x 100 mm sample stage
  • Maximum sample height of 14 mm
  • Simple loading-unloading using a drawer
  • Safety interlock for sample drawer
  • LCD display showing 'time passed' and 'time left'
  • 60-minute timer
  • High intensity UV light source
  • High temperature thermal cutout
  • Solvent-free cleaning of samples
  • Provides ultra-clean surface

*Please note that this UV Ozone Cleaner does NOT have an integrated ozone filtration system, and must therefore be operated in a working fumehood.

UV Ozone Specifications

UV lamp type
Synthetic Quartz UV Grid Lamp
UV lamp dominant wavelengths 185 nm and 254 nm
UV lamp dimensions 100 mm x 100 mm
UV lamp current 30 mA (constant)
254 nm output intensity 20 µW/cm2 at distance of 100 cm
UV lamp lifetime T80 (2000 hours); 8-10 years of standard daily use
Power supply

Mains 220-240 VAC Fused at 1A

Optional AC/AC Adapter

110 V / 230V

Max run time 59 minutes 59 seconds
Safety features Safety interlock, High temperature warning, thermal cutout
Substrate tray size 100 mm x 100 mm
Maximum recommended substrate size 100 mm x 100 mm


Overall Dimensions

Width 204 mm

Height 227 mm

Depth 300 mm


UV Ozone Cleaner

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To the best of our knowledge the technical information provided here is accurate. However, Ossila assume no liability for the accuracy of this information. The values provided here are typical at the time of manufacture and may vary over time and from batch to batch.