Manual Micromanipulator for Probe Stations And Electrical Measurements
Ergonomic three-axis micropositioner for precision micron-scale probe placement
Overview | What is Positioning Resolution? | Specifications | Reducing Leakage Current and Resistance
Features | Gallery | In the Box | Compatible Adaptors | Accessories | Resources and Support
Perform delicate probe alignment and make stable electrical contact with our XYZ micromanipulator equipped with 20 μm tungsten probe. Precision linear bearings ensure smooth, repeatable motion and micron-level accuracy down to 4 μm with minimal backlash or drift. For the most sensitive experiments, the fine-pitch micrometer option allows you to move the probe by as little as 2 μm.
Designed for ergonomic left- or right-handed operation, the probe is easy to position without looking away from your microscope. The manual micrometers are aligned to each of the three axis of motion and can be used to make intuitive probe adjustments along a 6.5 mm graduated travel distance. In addition, the magnetic base and compact size make it possible to use multiple micromanipulators on benchtop probe stations, while the included SMA to SMA coaxial cable supports a range of adapters and can be used to connect the micromanipulator to nearly any source measure unit.
For semiconductor devices, we recommend pairing two or four micromanipulators with the Ossila Probe Station and Source Measure Unit to complete your electrical characterization setup.
Micron-Level Resolution
Accurate motion with minimal backlash or drift and a 2-8 µm positioning resolution
Dual Setup Available
Ergonomic left and right-handed micromanipulators available, or save with a pair
Low Leakage Current
Less than 100 pA leakage current at ± 75 VDC, and less than 0.3 Ω path resistance
Fully Equipped
20 μm tungsten probe tip included as standard, or fit with a universal tool clamp
Choosing the Right Positioning Resolution
The positioning resolution of your micromanipulator determines the smallest achievable motion of the probe. What positioning resolution you need depends on the scale and sensitivity of your experiment. The Ossila Micromanipulator is available with either a 10 μm or 5 μm micrometer readout resolution. This refers to the markings on the micrometers. In practice, since the micrometers offer a continuous adjustment rather than a stepped adjustment, the smallest achievable motion is finer than the readout resolution.
As the micrometers on our high-resolution micromanipulators are larger than those on the standard model, and have a finer pitch screw, the achievable resolution also differs between the two: the smallest realistically achievable motion on the 10 μm resolution micromanipulators is 4-8 μm, while the larger micrometers on the 5 μm resolution micromanipulators allow you to move the probe by as little as 2-4 μm.
Technical Specifications
Motion
| T2007A1 | T2007B1 | |
|---|---|---|
| Drive Axes | X, Y, Z | X, Y, Z |
| Drive Fine Movement | Micrometer | Fine-pitch micrometer |
| Maximum Axis Travel | 10 mm | 10 mm |
| Graduated Axis Travel | 6.5 mm | 6.5 mm |
| Micrometer Readout Resolution | 10 μm | 5 µm |
| Micrometer Head Thread Pitch | 50 threads per inch | 100 threads per inch |
| Smallest Achievable Motion | Approx. 4-8 µm | Approx. 2-4 µm |
Probe
| Probe Material | >99.95% pure tungsten |
|---|---|
| Probe Tip Diameter | 20 μm |
| Probe Leakage Current | <100 pA at ± 75 VDC |
| Probe Path Resistance | ≤0.3 Ω |
| Probe Length | 32 mm |
| Probe Shaft Diameter | 0.508 mm |
| Probe Connection | SMA |
Leakage Current and Probe Path Resistance
When using a micromanipulator for any electrical characterization, it is important to minimize resistance in the measurement chain wherever possible. In the case of a micromanipulator connected to a measurement device, this additional resistance can come from three sources: contact resistance, system resistance and lead resistance.
- Lead resistance refers to the resistance introduced by cables, wires or leads connecting the probe to the instrument.
- Contact resistance refers to the resistance at the interface between the probe tip and the material under test. This can be affected by incomplete connections, pad geometry, surface roughness, oxide layers or contamination.
- System resistance denotes any resistance encountered on the path from the probe tip through the manipulator arm. Oscillations or displacements of the manipulator arm, or poor contact seating can increase this path resistance.
In practice, the Ossila micromanipulator reports a path resistance of <0.3 Ω (tip-to-instrument). However, this value depends on the quality of contact between probe and substrate, and type of cable used.
Leakage current refers to any unintended current flow outside the desired circuit path — for example, through insulation, across surfaces, or via parasitic paths. In precision device characterization (i.e. on the scale of nanoamperes or picoamperes), even small leakage currents matter, contributing to noise or offset error. The Tungsten probes included with the Ossila Micromanipulator exhibits leakage current of <100 pA at 75 V DC.
Ossila Micromanipulator Features
Precise Three-Axis Positioning
Use the micropositioners to move your probe by as little as 2 μm along three-axes for precise and reliable probing. The precision linear bearings on each axis provide smooth and repeatable movement, while the spring-loaded bearings eliminate backlash so you can get accurate measurements in sensitive experiments.
Comfortable Manual Control
Stay focused on your microscope with blind probe control. For each direction of movement, the micrometer controls are aligned with the corresponding axis so you can intuitively make adjustments. With magnetic bases, our micromanipulators also pair seamlessly with the Ossila Probe Station to complete your probing setup.
DC Current Probing
Get accurate measurements in your sensitive electrical tests with a low leakage current and path resistance. Set up your micropositioners quickly using the SMA connector and prevent vibration or noise from disrupting your results with the secured coaxial cable. Connect to nearly any source measure unit using a suitable adapter.
Adapt to Your Experiments
Swap the tungsten probe for a wide range of probes, syringes, micropipettes, vacuum needles, optical fibers, and more. The Ossila Micromanipulator is designed for labs that demand versatility so you can take advantage of excellent positioning accuracy whatever your application or experimental requirements.
Product Gallery
Additional Specifications
| Base Type | Permanent Magnet |
|---|---|
| Body Material | Anodized Aluminum |
| Dimensions (L x W x H) | 155 mm x 74 mm x 78 mm (6.10" x 2.91" x 3.07") |
| Extended Dimensions (L x W x H) | 231 mm x 77 mm x 84 mm (9.09" x 3.03" x 3.31") |
| Weight | 400 g |
In the Box (Per Unit)
- Micromanipulator
- 20 μm tungsten probe tip
- 1 m SMA to SMA coaxial cable
- Documentation
Connecting Micromanipulators to Measurement Instruments
The Ossila Micromanipulators can be paired with the differential interface, which accepts up to three SMA inputs and delivers dual-channel BNC outputs to connect straight into the SMU channels.
When a true four-wire configuration is required, the micromanipulator can be connected via the Ossila SMA to Banana Adapter (coming soon), which offers four SMA inputs and corresponding banana terminals (Force HI, Force LO, Sense HI, Sense LO). For simpler single-channel setups, it can also be used with the triaxial adapter, providing a straightforward SMA-to-triaxial connection.
Ossila micromanipulators are designed to connect to a wide range of common measurement instruments using an appropriate adapter. Compatible adaptors include:
| For Measurement Instrument | Use Compatible Adaptor |
|---|---|
| Ossila Source Measure Unit | Differential Interface (SMA-to-BNC) |
|
Keithley 2400 series Keysight B2900 series Rhode & Schwarz NGU series |
Micromanipulator SMA to Banana Interface |
|
Keithley 2450 series Keithley 2600B models (check model) Keysight B1500A series |
Triaxial adaptor (SMA-to-triaxial) |
*Ossila Ltd is not affiliated with, endorsed by, or sponsored by Keithley, Keysight, Rhode & Schwarz, or any other instrument manufacturers mentioned. All product names and trademarks are the property of their respective owners and are used for identification purposes only. Compatibility information is based on published interface standards and has not been confirmed through Ossila testing.
Complete Your Electrical Characterization Setup
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