Evaporation Stack for High Density OFETs

Order Code: E312

Price

(excluding Taxes)

£349.00


 

The evaporation stack holds the source-drain shadow masks and substrates in close contact for thermal evaporation. This is crucial for device fabrication because the source-drain channel is the most critical feature on an OFET. For use with the high-density OFET source-drain evaporation masks (sold separately).

 

Datasheet

The key component is the lower support, which is milled from a solid block of aluminium to provide high-precision recesses for individual shadow masks and substrates, and allows mixing-and-matching of shadow masks within a single evaporation.

 

Size 75 mm x 75 mm
Thickness 2 mm (exc. bolts)
Material Lower support: milled aluminium
Lid: stainless steel
Magnetic sheet: vinyl-laminated polymer resin with ferrite powder
Substrate capacity Radial design: 10 substrates
Square design: 12 substrates

 

High density OFET evaporation stack (bottom view)Details of high density OFET mask and support
Left: High-Density OFET Evaporation Stack (radial orientation, bottom view) with 2 shadow masks and silicon substrates in the centre. Right: Magnified example of high-density OFET source-drain mask within completed stack.

 

The diagram below shows an deconstructed view of how the evaporation stack fits together. At the base of the system is the lower support, which prevents the thin and flexible shadow masks from warping. This support has recesses in which individual masks are placed with the substrates placed on top of them. The lid is used to bolt everything together into a mechanically stable system that can be mounted in a deposition system at any orientation. Finally, a thick, low strength magnetic sheet is placed on to pull the shadow mask in close contact with the substrates (note that this differs from the low density evaporation stack where the magnetic sheet is placed underneath the lid).

High-density OFET evaporation stack (exploded view)

 

 

Magnetic sheet
Holds the shadow masks flush against the substrates

 

Lid
Holds the substrates in position

 

Substrates (sold separately)
Up to ten substrates per mask

Shadow Masks (sold separately)
Mix and match masks with different geometries within the same evaporation

Combined Lower Support (square) and Substrate Holder
Milled from a single piece of aluminium to provide mechanical support for the shadow masks and substrates.

 

High density substrate holder  
Dimensioned drawing of the square orientation lower support for the high-density OFET evaporation stack.

 

Demonstration Video

PLEASE NOTE: The magnetic sheet should now be placed on top of the lid, so that it can be taken off while the substrates are still secure in the stack, thus avoiding damage to the substrates.

 

To the best of our knowledge, the technical information provided here is accurate. However, Ossila assume no liability for the accuracy of this information. The values provided here are typical at the time of manufacture and may vary over time and from batch to batch.

 


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