Low Density OFET Fabrication System Overview and Schematic

The below diagram shows an exploded view of how the evaporation stack fits together. At the base of the system is the lower support which prevents the thin and flexible shadow masks from warping. The shadow masks are then placed on top of the lower support. Above this, the substrate support holds the substrates in alignment with the mask before a low strength magnetic sheet is placed on to pull the shadow mask in close contact with the substrates. Finally the lid is used to bolt everything together into a mechanically stable system that can be mounted in a deposition system at any orientation.

OFET low density evaporation stack exploded diagram

 


Lid: Holds the substrates and magnetic sheet in position

Magnetic sheet: Pulls the thin and flexible shadow mask into close contact with the substrate

Substrates: Up to twelve substrates per mask (sold separately)

Upper support: Holds and aligns the substrates in position above the shadow mask

Shadow mask: Interchangeable shadow masks with varying designs. Five OFETs per substrate

Lower support: Provides mechanical support to the thin and flexible shadow masks

 

 

 

System Overview

The low density fabrication system has four different masks available to allow the fabrication of devices in any geometry (top/bottom gates and top/bottom source-drain). The diagrams below show the features on each of the individual masks as well as how they fit together on a substrate.

Note that silicon oxide substrates do not need a gate mask which simplifies fabrication, however the use of a gate mask with quartz-glass substrates can allow lower operating voltages and lower parasitic capacitance.

OFET low density evaporation stack system components
OFET low density evaporation stack system overview