High-Density OFET Fabrication System Overview and Schematic
The below diagram shows an exploded view of how the evaporation stack fits together. At the base of the system is the lower support which prevents the thin and flexible shadow masks from warping. This support has recesses in which individual masks are placed with a substrate above. A low strength magnetic sheet is placed on to pull the shadow mask in close contact with the substrates. Finally the lid is used to bolt everything together into a mechanically stable system that can be mounted in a deposition system at any orientation.
Holds the shadow masks flush against the substrates
Holds the substrates in position
Substrates (sold separately)
Up to twelve substrates per mask
Shadow Masks (sold separately)
Mix and match masks with different geometries within the same evaporation
Combined Lower Support (square) and Substrate Holder
Milled from a single piece of aluminium to provide mechanical support for the shadow masks and substrates.
The high density fabrication system has four different masks available to allow the fabrication of devices in any geometry (top/bottom gates and top/bottom source-drain). The diagrams below show the features on each of the individual masks as well as how they fit together on a substrate.