High-Density OFET Fabrication System Overview and Schematic
The below diagram shows an exploded view of how the evaporation stack fits together. At the base of the system is the lower support which prevents the thin and flexible shadow masks from warping. This support has recesses in which individual masks are placed with a substrate above. A low strength magnetic sheet is placed on to pull the shadow mask in close contact with the substrates. Finally the lid is used to bolt everything together into a mechanically stable system that can be mounted in a deposition system at any orientation.
Lid: Holds the substrates and magnetic sheet in position
Magnetic sheet: Pulls the thin and flexible shadow mask into close contact with the substrate
Substrates: Up to twelve substrates per mask (sold separately)
Interchangeable Masks: Mix and Match OFET geometries within the same evaporation with 20 OFETs per substrate
Combined Lower Support and Substrate Holder: Milled from a single piece of aluminium to provide mechanical support for the interchangeable masks and align the substrates
The high density fabrication system has four different masks available to allow the fabrication of devices in any geometry (top/bottom gates and top/bottom source-drain). The diagrams below show the features on each of the individual masks as well as how they fit together on a substrate.