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Source-Drain Deposition Mask, High Density

Product Code E321
Price $26.00 ex. VAT

Shadow masks for deposition of source-drain contacts. Designed for use in the Evaporation Stack for High Density OFETs with our standard sized substrates of 20 x 15 mm. Each mask produces 20 OFETs on a single substrate. We sell a selection of masks for different precisions in linear and interdigitated patterns.

If you would like to mix and match geometries, please let us know when ordering.


General Mask Specifications

Mask dimensions 20 x 15 mm
Number of OFETs 20
Contact pad size 1 mm x 1 mm
Contact pitch 2.54 mm (0.1")
Mask material Electroformed nickel
Compatible products Evaporation stack: E311
Glass Substrates: S151
ITO substrates: S111
Silicon substrates: S146

Individual Mask Specifications

Product Code E321 E322 E323
Channel Geometry Linear Linear Interdigitated
Channel Width 1 mm 1 mm 18.23 mm
Channel Length 30 µm 30, 40, 50, 60, 80 µm (4 of each) 50 µm
Tolerance ± 7 µm ± 7 µm ± 7 µm
Mask Thickness 30 µm 30 µm 30 µm


Linear 1 mm x 30 µm (E321) and 1 mm x 30 µm variable (E322)


Interdigitated 18 mm x 50 µm (E323)


Assembly Video

PLEASE NOTE: The magnetic sheet should now be placed on top of the lid, so that it can be taken off while the substrates are still secure in the stack, thus avoiding damage to the substrates.



The mask is designed in such a way that during the deposition of the gate electrodes on the corner of the substrate the metal should cover the edge of the substrate as well. This ensures conductivity between the metal electrodes and the p-doped silicon. If you find the edges of the substrate not to be conductive you must scratch the edges of the substrate to remove the insulating silicon oxide in correspondence with the corner where the gate electrode will be deposited.

Prefabricated OFET: gate electrode details
Prefabricated OFET: details of the gate pad/doped silicon electrical contact.


To the best of our knowledge the technical information provided here is accurate. However, Ossila assume no liability for the accuracy of this information. The values provided here are typical at the time of manufacture and may vary over time and from batch to batch.


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